The pregnant actress, 46, wed her long-term boyfriend at the Chateau des Conde in Olivier's native France on Saturday (July 13).
Halle is reported to have arrived in a vintage car wearing a simple cream dress.
The X-Men actress previously said her wedding would "be very small".
The pair began dating after meeting on the set of Dark Tides in August 2010, and announced their engagement in March 2012.
Halle has been married twice before, and has a five-year-old daughter, Nahla, from a former relationship with model Gabriel Aubry.
This is the first marriage for actor Olivier, 47, who previously dated Kylie Minogue.
Halle and Olivier are expecting a son in October.
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